• Load wide variety of image data
• Tiff, BMP, jpeg, gif, png, ras, ppm, hdf, pcx, xwd, bpm, pgm
• Prolith AIM files
• DI AFM files
• Zygo Interferometer files
• Load any image data directly from clipboard
  
• New file types available upon request
• Pattern Rec for device-level LER or CD measurements
• Contact-analysis capabilities
• Corner-rounding measurement capabilities
• Process-window analysis capabilities
• Surface analysis tool, detrending, 2D PSD, isotropic PSD, integrated roughness, flare ...
• Region of interest (ROI) processing
• Line-based ROIs
• Rectangle-based ROIs
• Multiple simulateous ROI processing
• Automated ROI array generation capabilities
• Extensive ROI interactive editing capabilities
  
• Batch mode operation
• Export batch data to CSV
• Inetegrated batch data plot tool for easy visualization of large data sets
• Threshold batch tool for automated through threshold analysis
• Automation to simultaneously measure both lines and spaces with built in reporting
• Compound data analysis
• Automatically combine multiple images into single analysis dataset
• Built in data visualization capabilities for easy report generation on large data sets
  
• Scripting language support
• Export "cleaned-up" processed image as tiff or Prolith mask file
• Synthesize SEM images of lines with LER and export image as tiff or Prolith mask file
• Stochastic resist modeling capabilities to synthesize resist images from aerial image data based on given resist parameters
  
• Results storage, retrieval, and export.
  • Save and reload calculation results to/from Matlab ".mat" files.
  • Export results to Excel-compatible ".csv" files.
  • Export results to Matlab command window (requires developers kit)
  • All plots can be exported as raw data or graphics and sent to clipboard for easy report generation
    
• Automatic calibration from most LEO and Hitachi SEM files (new formats available on request)
• Various manual calibration methods
• Built-in image processing
  • Image rotation
  • Negative image
  • Image cropping
  • Image filtering
  • Image detrending
    
  • Processed image export
• View zoom capabilities
• User-configurable preferences
• Automatic, semi-automatic, and manual fence positioning
• Numerous built-in processing algorithms
  • User-selectable threshold
  • User-selectable threshold detection algorithm
  • User-selectable line-edge interpolation algorithm
  • User-selectable outlier handling
  • Line-edge-data post processing options
• Recipe creating storage and retrieval capabilities
• User-defined algorithm presets for convenient recall of settings
• User-Defined processing function capabilities (requires developers kit)
• Integrated visualization
  • Lineout plots of SEM image
  • Interactive threshold-setting plot of resist lines
  • CD as a function of length along line
  • Line-edge position as a function of length along line for easy outlier detection
  • Spectral visualization
  • Processed line-image visualization
  • Line-edge overlay on SEM image and processed line image
• Inegrated spectral analysis
  • High-pass, low-pass, band-pass, and notch filtering of LER spectrum
  • Automatic PSD noise-floor estimation
• Integrated line-image pre-filtering options
• Advanced LER Metrics
  • Height-height correlation function
  • Sigma versus length function
  • PSD slope calculation
  • Correlation length calculation
  • Roughness exponent calculation
  • Automatic PSD noise-floor estimation
  • System noise estimation tool
• Integrated interactive fence metrology
• Integrated interactive line-out metrology

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