MetroLER

DOWNLOAD VERSION12.7.2

Version 12.7.2 : FEM batch now also saves LWR data Process window tool updated to handle new linear FEM batch output file format containing both LER and LWR Fixed bug that could mistakenly report LER/LWR as negative number Speed up contact analysis Batch file now saves Fractal PSD fit parameters Additional image processing on file load functionality added Interested in modeling mask effects? The SuMMIT Surface Analysis Toolbox allows for easy synthesis of mask modeling input given surface data from a variety of tools including AFM and interferometers. Looking for robust second order statistics modeling? SuMMIT supports computational extraction of parameters based fitting to physical PSD models thereby extracting spatial characteristics of the LER. SuMMIT also provides integrated stochatic resist modeling capabilities. Load an aerial image into SuMMIT, define the resist parameters, and SuMMIT will compute the resulting stochastic resist image and automatically compute the LER. (Requires Stochastic Resist Modeling Toolbox)

WINDOWS 7 and 10 INSTALLATION NOTE:  When running on Windows 7 or 10, you may need to setup SuMMIT to run as administrator, to do so, right click on the SuMMIT short cut and select "Run as Administrator". The problem has to do with User Account Control (UAC) in Windows 7 and thus might also be addressed by turning off UAC as described at the Microsoft website. Also remember to setup the shortcut to run the program as administrator (Right click on shortcut, select properties, choose compatibiity tab, and set the "Run this program as administrator" checkbox. Note also that the program needs write permissions in its install directory tree in order to run properly. If write privelelges cannot be granted in the Program Files folder, SuMMIT may also be installed directly into the appropriate User's folder instead of the default Program Files folder.

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RECENT UPDATE HISTORY

2/23/22: Version 12.5.0

10/23/21: Version 12.4.0

2/15/21: Version 12.3.0

• New corner radius calculation capabilities added to 2D toobox
• New corner radius reporting capabilities added to 2D toobox including batch mode
• Fix various bugs

4/7/20: Version 12.1.1

• Improve autoFence performance
• Fix display bugs in Corner Rounding Toolbox
• Fix error in reporting of Fractal LER/LWR when Post Processing Filter is moved
• Add new localized threshold methods enabling ability to compensate for intensity changes across the image
• Fix various bugs

2/18/19: Version 11.6.2

• Add optimized aspect ratio image display capability
• Add main window PSD plot export capabilities to script language
• Fixed bugs related to summary windows
• Add image interpolation to script language
• Fix error in binarize image functionality of script language
• Improve handling of PSD calculation for MultiROI mode
• Add ability to display and export fractal LER and LWR values
• Improve speed of fractal PSD fit
• Fix various bugs

2/18/18: Version 11.6.0

• Speed up processing of very large data sets
• Add ability to work with larger images
• Improve search range limit algorithm
• Add auto-fine-tilt correction capability
• Add auto-fine-tilt correction setting to recipe tool which will automatically correct the image tilt before calculating LER
• Add auto-fine-tilt correction capability to the image processing menu allowing the image tilt to be determined and corrected
  
• Fix bug that caused intermitent error in pattern rec mode
  
• Fix various bugs

1/18/17: Version 11.4.0

• Add fence add and delete capabilities to new script language
• Add fence mode selection capabilities to new script language
• Add ROI definition capability to new script language
• Add Pattern Rec functionality to new script language
• Add export all data functionality to new script language
• Speed up processing of very large datasets
• Add automatic pixel size calibration capabilities for Zeiss SEM files
• Add ROI generator capabilities to new script language: loading ROI generator, generating ROIs, setting the generator parameters
• Add script server function that will monitor a directory for new scripts to execute
• Fix integrated batch outpul file plot tool
• Improve fractal PSD fitting in surface toolbox to handle cases where the PSD high frequency slope is > 3 (effective roughness exponent > 1
•  Improve Threshold Batch functionality on contacts
•  Increase user setable range for allowable deprotection threshold in the stochastic resist modeling toolbox
• Improve compatibility of stochastic toolbox with multi-ROI mode
• Fix various bugsnt threshold algorithm to better handle lines with left/right intensity assymetry

4/14/17: Version 11.0.0

• Add ability to plot unbiased PSD to the AdvancedLER Analysis Tool
• Improve search range limit algorithm performance
• Improved side independent threshold algorithm to better handle lines with left/right intensity assymetry
• Significantly speed up side independent threshold algorithm
• Significantly speed up polynomial edge detection algorithms
• Significantly speed up model-based edge detection algorithms
• Improve convergence performance of model-based edge detection algorithms
  
• Add user selectable speed options for model-based edge detection
  
• Other assorted performance enhancement upgrades and bug fixes

10/26/16: Version 10.14.0

• Improved PSD normalization accuracy
• Improved fractal model PSD fitting
• Improved plotting functions
• Added ability to compute Scatter PSD
• Added surface and phase histogram computation capabilities
• Added isotropic autocorrelation computation capabilities
• Added piecewise linear apprimation fitting to isotropic PSD
• Added File and Image Proc menus to Surface Toolbox Window

2/18/16: Version 10.13.0

• Fixed problem with incorrect spatial frequency scaling being reported in the exported PSD file when using rectangular pixels
• Improved reliability of license file hot swapping
• Added staggered and offset ROI capabilities to the ROI generator tool
• Fixed problem with corner rounding toolbox recipe tool

3/27/15: Version 10.12.0

• Added support for Version 8 DI AFM files
• Added CER and CWR data to batch output files
• Fix problem with contact edge data export aspect ratio when in fence mode instead of ROI mode
• Fix problem with contact edge polarity detection when in fence mode instead of ROI mode
• Fix bug that caused crash when opening recipe tool after exporting line edge data
  

7/31/14: Version 10.10.0

• Add average line intensity cross-section data to batch output
• Fix error that occured if x or y spacing plot is requested when contacts are analyzed in ROI mode.
• Fix display bug with Contact Plot Tool
• Fix problem causing no batch output in MultiROI mode
• Fix problem with Abort Batch button

4/17/14: Version 10.9.0

• Add raw line edge output to batch mode
• Fix problems with interactive calibration dialog boxes
• Add error checking on window sizing at startup
  
• Add ability to apply notch filter to LER PSD analysis
• Improve accuracy of fractal fitting to PSD
  
• Include fractal fit when exporting PSD plot in Advanced LER window
• Stochastic modeling: Add warning message if acid diffusion kernel looks too small
• Stochastic modeling: Add protecting group stochastics to the stochastic resist model
  
• Stochastic modeling: Improve accuracy of time-stepping reaction-diffusion implementation
• Stochastic modeling: Improve accuracy of PAG saturation effects
• Stochastic modeling: Add user ability to set the reaction diffusion time step size
• Stochastic modeling: Improve accuracy when using larger time steps enabling faster operations
• Stochastic modeling: Add ability to save and load stochastic resist recipes

4/29/13: Version 10.7.0

12/29/12: Version 10.6.0

• Fixed intermitant error with threshold plot
• Added user setting to define random seed handling:
             default - resets the seed each time summit is started
             random - randomizes the seed on each calculation
             fixed - uses same user-defined seed for each calculation
• Corrected error in computation of bias corrected LER values in multi-CD contact mode
• Fixed problem with using linear interpolation with bright contacts in dark field
• Fixed problem with loading interline variation plot mode while in multiCD contact mode
• Fixed problem where Stochastic model corrupted the existing ROIs upon generation of new stochastic image
• Fixed problem with batch mode output in multi-CD line mode
• Fixed problem with preserve multi-roi on image load functionality
• Added new batch on directory function
• Added directory to batch to script language
• Added external command to script language

9/18/12: Version 10.5.0

Introducing a new look and major improvements.

Improvements include

• Increased program speed
• Improve ability to measure bright contacts in dark field
• Add ability to search for edge from the fence lines in instead of from the center out
• New autofence flattening capabilities added, the greatly improves autofence capabilities when dealing with images with long range intensity variations
• Upgrade Developer's Kit to newer version of Matlab
• Add ability to load and save ROI Array Generator structures
• Add context menu to image for exporting
• Add new edge profile export capability to image context menu
• Added corner dual axis resize capabilities to pattern rec region, detrend region, and roi array genererator
• Improve ability to manipulate fences and ROIs when they are very near a drawn edge profile
• Fix problems with some of the advanced plotting tools
  
• Fix problem with script locking up on fence error
• Fix intermitent problem with contact analysis
• Fix potential conflict with inner vertical limits and ROI mode
• Fix intermitent bug in starting up the corner rounding toolbox
• Fix intermitent bug with line calculation in ROI mode
• Fix bug that caused all ROIs to get deleted when any one is right clicked
• Fix problem with host filter causing error when non integer value
• Fix problem with ROI generator tool reporting values in pixels instead of nm
• Fix intermittent problem with detrending function
• Fix bug that prevented batch run from being canceled
• Fix bug with display of pattern rec region under some conditions
• Fix bug with files to batch function
• Fix bug with batching through images with non-square pixels
• Prevent ROI generator array from dissapearing after stochastic model is run
• Correct problem with appearance of fences when swtiching to and from multi ROI mode within contact mode

4/3/12: Version 10.0.0

• Streamlined GUI
• Add new autofence mode to better handle lines near edge of image
• Add ability to measure posts as well as contacts
• Improve robustness of contact algorithms for dealing with low contrast noisy images
• Add new ROI array generation, manipulation, and view capabilities
  
• New interactive detrend region definition and view capabilities
• New interactive pattern rec region definition and view capabilities
• Improved robustness of script and batch runs
• Improve functionality of Corner Analysis Toolbox
• Improve functionality of Surface Anslysis Toolbox 
• Add compatibility with DI Nanoscope 5 files
  
• Fix problems with image interpolation functionality
  
• Allow batch and script runs to continue without user intervention after non-fatal errors

2/25/12: Version 8.9.0

• Fix bug with detrending image processing functions
• Add line-by-line detrend capability in main window image processing function
• Add line-by-line detrend capability in surface analysis tool
• Add line-by-line detrend capability to recipe proc-on-load options
  

1/14/12: Version 8.8.0

• New more robust autofence algorithms added for improved batch operations

11/3/11: Version 8.7.0

• Fixed bug with slot analysis
• Fix bug with image detrending in contact mode
• Fix bug with batch processing in contact mode
• Surface tool image now automatically updates on new image load
• Fractal PSD fitting capabilities added to surface tool
• New synthesized surface export tool added supporting the modeling of mask surface roughness
• Correct error with reported LER/LWR number when filter line is moved
• Report uncertainties in andvanced results window and batch output file
• Add ability to fit LER PSD against factal model
• Fix bug with advanced LER tool which did not automatically update upon new calculation
• New "Add white noise" image processing function to help evaluate filtering effectiveness
•  Fix bug that caused image processing resize function to limit pixel size to integer values
• Expand Stochastic Resist Modeling Toolbox to include reaction/diffusion and acid amplifier capabilities
• Add PAG, quencher, and acid amplifier stochastics to Resist Modeling Toolbox
• Add electron blur to Resist Modeling Toolbox
• Add ability to analyze intermediate images in Resist Modeling Toolbox: photon image, pre-bake acid, pre-bake quencher, final acid image, final quencher image,...

3/6/11: Version 8.0.0

• Improve trench fencing accuracy
• Batch output for advanced contact results
• Preserve absolute indexing during contact batch analysis
• Fix bug in fence/ROI save and load functionality
• New recipe option to preserve fences/ROIs on image load
• Improve auto noise floor detection algorithm to better deal with high noise images
• Improve accuracy of unbiased LER/LWR computation
• Change main screen display to report raw LER instead of infinity LER
• Show computed noise bias on PSD plots

10/24/10: Version 7.6.0

• Improve accuracy of stochastic resist modeling toolbox
• Add image intensity linear detrend image processing capability
• Add image intensity quadratic detrend image processing capability
• Add image processing on image load capabilities as defined in recipe. Capabilities include rotation, linear and quadratic detrending, and median filetering
• New Line/space automated CD/LER/LWR processing tool
• Improve usibility of threshold batch tool

7/7/10: Version 7.5.0

• Fix problem with prefilter buffer
• Add ability to automatically handle posts (bright contacts)
• Add contact recipe setting allowing the outer portion of a contact with edge ringing to be found
• Fix problems with defining Patern Rec Region while in Multi ROI mode with ROIs defined
• Fix problem that caused a ghost ROI to appear when multi ROIs are loaded from a file and ROIs are already defined in image
• Fix problem that caused ROIs to not be deleted on image load in certain cases
• Remember and default to previous pattern rec. region when defining new pattern rec. region
• Add ability to toggle preview of pattern rec region
• Implement default batch file naming convention
• Show name of running batch file in the program status text box
• Make ROI array tool remember previous settings
• Add base concentration and interaction volume to the stochastic resist toolbox
• Fix bug that caused autoCompute check box to dissapear in the stochastic resist toolbox
• Upgrade stochastic resist toolbox to use absolute dose thresholding
• >4x improvement in filtering speeds which greatly improves analysis speeds in all cases employing image prefiltering as well as the new stochatic resist modeling toolbox

12/30/09: Version 7.3.0

• New Batch Plot Tool that allows plotting of selected variables from SuMMIT batch output files
• The new Batch Plot Tool also includes automated threshold batching capabilities (the ability to batch through a series of threshold values on a single image)
• Major improvements to the 2D analysis toolbox in terms of analysis of slot features both in terms of accuracy and speed
• Fix problems that occurred in specific cases involving use of image prefiltering before and after use of an image processing function
• Add ability to export Process Window Toolbox plots to clipboard and PNG file
• Move legend outside of plot axis in Process Window Toolbox plot window for improved readability
• Add ability to save FEM data edited through the Process Window Toolbox GUI

7/1/09: Version 7.0.0
- New Stochastic LER Modeling Toolbox
- Change HOST filter function to the 3D version integrated down to 2D
- Improve GUI look
- Add force rotate option to recipe
- Add whisker plot capability for the SVL plot
- Add edge ring auto-fence recipe to contact toolbox
- Add general purpose 2 auto-fence algorithm to contact toolbox
- Add LWR to single line results box
- Streamlined corner rounding recipe
- Fix problem with disappearing corner guide when small image is loaded after large image
- Enable batch process in corner rounding mode
- Improve single to multi ROI switching functionality
- Use ROI to set the pattern rec region instead of limit lines
- Recipe option to include bias removal in filtered LER

2/12/09: Version 6.5.0
- Add ability to export all plots to graphic file or clipboard through right-click context menu
- Add ability to export image with detected edge overlay to graphic file or clipboard
- Improved slot analysis performance
- Add additional statistical results to CSV export file
- Add advanced contact data results to CSV export file
- Add advanced contact data results to batch output file
- Fix bug that caused batch or compound analysis to fail if secondary window is made active during run
- Fix bug that caused error when using metrology noise estimation tool without shared fencing
- Fix bug that prevented the left-right correlation tool from having access to all the line after having run a compound analysis
- Have compound analysis mode keep track of source image for each analyzed line
- Report all source filename in exported CSV file after compound analysis
- Add new mirroring image processing functions to image-processing menu
- Automatically update summary window data when post-filter settings are changed

1/15/09: Version 6.4.0
- Fixed bug in Multi-ROI tool that could cause errors when long-narrow ROIs are defined
- Fixed bug in contact-hole analysis toolbox that caused errors when vertical slots are analyzed
- Improved accuracy of HHCF and SVL computations when large-domain, small-kernel image prefilters are used
- Fixed bug that prevented Interline Variation Plot Tool from being automatically upfated when a calculation is run
- Included advanced contact metric data to CSV output file when in contact mode
- Corrected problems with exporting main window plot data using the right-click context menu on the plot area
- 2X speed improvement of averaged side thresholding calculations
- Improved accuracy of polynomial edge detection algorithm
- Improved accuracy of sigmoidal edge detection algorithm
- Improved accuracy of gradient-based edge detection algorithms
- Improved edge detection accuracy when dealing with low-contrast/high noise images
- Fixed bug that caused Advanced Contact Plot Tool to stay open when program is quit

10/27/08: Version 6.3.0
- Make pattern recognition capabilities to compatible with multi-ROI mode
- Make pattern recognition capabilities to compatible with contact-analysis toolbox
- Fix bug in contact-analysis toolbox that caused error when analyzing large number of small contacts
- Improve precision of corner rounding analysis with new iterative algorithm
- Improve usability of corner-rounding recipe tool
- Fix bug that caused error in corner-rounding toolbox when dealing with very small images
- Enable user control over smart color map scaling feature (part of view menu)
- Fix error in reporting of image statistics over ROI region with the "Image Statistics" tool
- Make image statistics information automatically update when the ROI is repositioned
- New multi-parameter HOST function prefilter option

8/9/08: Version 6.2.1
- Improve usability and appearance of new Interline Variation Plot Tool
- Make point selection for delete option in interline variation plot tool more robust
- Automatically update all other GUI elements after delete point in interline variation plot tool
- Add data crop lines to interline variation plot tool allowing a range of data point to be deleted
- Enable undo data crop for Interline Variation Tool
- Fix bug that caused error when setting high-frequency filter point by clicking on the GUI Tc-h field
- Improve usability of main window
- Add new bin function to image processing menu (also add to script language)
- Add new gaussian noise function (also add to script language)
- Add new DC flare add function to image processing menu
- Add ability to save and load fence and limit positions

6/14/08: Version 6.1.0
- Make corner guide in the corner rounding analysis toolbox default to previous location on image load
- Fix error the reported LER uncertainty while and after dragging filter line
- Improve usibility of corner rounding toolbox GUI
- Add corner-rounding plot autosave feature
- Add capability for interactive deletion of processed lines using the interline variation plot tool
- Make summary and advanced results windows compatible with Multi ROI Mode (Part of contact/2D analysis toolbox)

5/30/08: Version 6.0.0
- Auto-update of threshold plot in custom-lineout or corner rounding analysis mode
- Threshold and lineout plots display filtered image data when filtered image preview is enabled
- Buffer prefiltered image data for more rapid preview mode toggling and repetitive image analysis
- Fix bug that could cause crash when auto noise floor estimation is used in corner rounding mode
- Fix bug that caused load errors in the surface analysis toolbox
- All new processing engine for the contact-analysis toolbox providing10x speed improvement
- New paste image from clipboard capabilities
- Fix error in advanced contact plot tool
- Fix bugs in autofencing of contacts
- Change reported average LER/LWR error bars to report the expected uncertainty on the average values instead of measured uncertainty on the single line measurements
- Completely new implementation of corner-rounding analysis toolbox for greatly improved precision, speed, and usability

3/10/08: Version 5.6.0
- Fix problem with roughness exponent calculation from the autocorrelation plot in advanced LER tool
- Add unbiased, infinity, filtered LER results to main screen, replacing raw LER
- Add automatic 1x-pitch post-filter cut-off period setting to match ITRS definition
- Fix problem with Process-window toolbox reading linear FEM files without using the Developer's Kit
1/14/08: Version 5.5.0
- Multi ROI capabilities added to the contact-analysis mode
- Fix problem with preserved limit lines and auto-rotation
- Fix problem with exporting to mat file format from surface-analysis toolbox
- Fix problem with limit lines not reseting on image size change
- Process-window analysis toolbox now available
------ Changes since beta release:
------------- New linear FEM file format added for compatibility with SuMMIT batch output
------------- Improved GUI
------------ Improved robustness in input FEM file
------------- New plot export capabilities

11/2/07: Version 5.3.1
- Fix problems with batch analysis of aerial-image modeling output files
- Improved support for machines with multiple MAC addresses
- Fix problem with exporting to mat file format from surface-analysis toolbox
- Add surface synthesis and export capabilities to surface-analysis toolbox

10/2/07: Version 5.3.0
- Simultaneous automatic H-V capabilities added to Multi ROI mode
- Add pattern rec capabilities to the multi ROI mode
- Fix problem that limited the pick file to batch function to selecting 15 files max.

8/24/07: Version 5.1.0
- Add new multi pitch autofence algorithm
- Fixed problem with application of limits loaded in from saved recipes or entered directly in the recipe tool
- Implement software controls preventing user from activating "fine rotation detection" without also having "full projection filtering" enabled
- Fixed problem with exporting data to csv file when only 1 single line is analyzed
- Fixed bug that caused error when running batch mode with single line analysis
- Fixed problem that caused limit line on-load mode setting to be ignored in batch mode

7/3/07: Version 5.0.0
- Add multiple arbitrary location and size region CD/LER computation capabilities to the contact-analysis toolbox
- New LER metric plot tool
- Add binarize image command to script language
- Data export now supports corner-rounding mode
- Improved robustness for the contact-analysis toolbox
- Improved accuracy of LWR computation with rectangular pixels

5/20/07: Version 4.7.2
- Enabled global image thresholding for corner-rounding toolbox
- Improved error checking for corner-rounding toolbox
- Added slot reference shape capability to contact-analysis toolbox
- Improved accuracy of correlation length calculation in presence of strong noise
- Improved accuracy of automated noise-floor estimation
- Fixed bug in side-averaging threshold algorithm that caused warning message to be repeadedly displayed slowing calculation down
- Fixed bug in side-averaging threshold algorithm that caused incorrect threshold value on right side with certain fence positions
- Fixed error in roughness exponent values stored in batch output file
- Added both filtered and unfiltered spatial metrics to batch output file
- Added both LER and LWR metrics to batch output file
- Added filter LER and LWR spatial metrics results to the csv export file

4/21/07: Version 4.7.0
- Improved robustness of contact gap measurement capability in contact toolbox
- Fixed problem with Pick Files to Batch capability that caused program to crash when not using the Developer's Kit
- Improved efficiency of Advanced LER Tool Summary calculation
- Corrected errors in Advanced LER Tool Summary report
- Improved robustness of contact LER measurement capability in contact toolbox
- Made Pattern Recognition capability compatible with batch mode operation

3/18/07: Version 4.6.5
- Fixed bug causing import problems in corner rounding mode
- Fixed bug causing scaling problems after image processing actions
- Added new threshold capability to image processing menu
- Improved usability of recipe tool
- Improved user interface for corner rounding toolbox
- Increased robustness of corner-rounding toolbox
- Imroved accuracy of corner-rounding calculations
- Fixed error with pitch computation with polynomial edge interpolation
- Added new filtered unbiased and infinity LER/LWR computation
- New contact gap measurement capability in the contact toolbox
- Fix bug causing sporadic problems with placing fenced
- Improved visibility of vertical fence lines
- Fixed bug that caused error when loading pre version 4.5.0 recipes in newer versions
- Fixed bug that caused file open dialog box image preview failures on some installations of windows
- Updated recipes distributed with SuMMIT
- Fixed bug that caused fences to be deleted after use of recipe tool
- Fixed bug that caused error in contact LER analysis with circular reference shape
- Improved contact toolbox autofencing allowing single contacts to be handled
- Add apply prefilter command to script language

1/26/07: Version 4.5.3
- Fixed bug causing read problems with some tiff files
- Improved accuracy of edge-visualization overlay line. This no impact on actual measured CD or LER values - Added toolbox information to About box
- Added HOST function prefiltering capabilities, good for dealing with aerial-image data

12/9/06: Version 4.5.0
- Fixed bug that caused crash when no lines were found between fences
- Improved accuracy of linear interpolation method for edge detection
- Improved PSD noise-floor detection algortithm to better handle extrememly low-noise LER data such as synthesized data
- Improved accuracy when dealing with post-filtered data in the PSD component of the Advanced LER Tool
- Add ability to read MicroMap files (mostly relevant to surface analysis toolbox)
- Fixed bug in auto brightness/contrast correction rountine
- Fixed problem with setting of the check mark on the analyze trenches menu item
- Enabled anisotropic sigma setting for gaussian prefilt
- Enabled setting of prefilter size and sigma through script language
- Enabled anisotropic sigma setting for contact-mode coarse gaussian prefilt
- Improved error checking for prefilter settings variable

10/30/06: Version 4.4.4
- Fix bug that caused reference shape to potentially be drawn in the wrong orientation when analyzing contacts with elliptical reference
- Improve contact field variation algorithm
- Improved speed of model-based sigmoidal edge fitting
- Fixed bug with polynomial and sigmoidal interpolation in corner rounding mode
- Fixed bug in compound analysis routine that appeared with release of contact toolbox
- Fixed bug that caused crashes in auto-roi-calculate mode when the roi was too small
- Added semi-auto mode capability to the corner-rounding toolbox potentially improving the accuracy of the calculation when the orthogonal edges of the corner are not well defined

7/13/06: Version 4.4.2
- Fixed bug related to reporting image pixel 2D size information after running interactive calibration routines
- Fix bug related to rotating images without having the default values set for limit line positions
- Corrected reporting of major and minor axis and orientation values for contact features
- Fixed bug that caused program crash when using skip or backup functionality while running batch file with semi-auto-fence
- Corrected problem with LWR measure and plotting in contact mode
- Add option to display the contact reference shape on top of the image instead of the detected edge, this option is set through the recipe tool
- Fixed bug that caused crash on certain tiff images

6/1/06: Version 4.4.1
- Added enhanced batch file capabilities such that dose and focus can be defined for each entry. In this mode an additional output file is created containing only four columns: focus, dose, CD, LER
- Fixed bug that caused crash when changing the auto-noise-floor setting with no image loaded
- Fixed bug with pattern rec that caused SuMMIT to act erratically after loading an incorrectly sized image with pattern rec enabled
- Fixed bug that caused program crash when using skip or backup functionality while running batch file with semi-auto-fence
- Fixed axis label error in histogram plots in contact plot tool
- Added beta version of process-window analysis tool

5/17/06: Version 4.4.0
- Fixed bug in "export all data to csv" functionality
- Added ability to import hitachi offline ler analysis file (RMSR file) (Beta capability)
- Fixed bug that caused wrong LER analysis length to be used when full-length is chosen and the image has rectangular pixels
- New limit line setting allowing them to be set to a default value on image load.
- Add ability to read LZW-compressed TIFF files.
- New console window for messages to user.
- Fix problems with plot exporting from Surface tool
- Fix problem with exporting histogram plot data from the advanced LER tool
- Fixed problem with summary calculation in advanced LER tool that caused inacurate calculation of average HHCF function
- Fixed problems that caused the script interpreter engine to fail on the following function: threshold_meth, edge_meth, setdefaultafm, rotate, setpsdprocwin
- Expanded the contact tool box (still in Beta testing)
----- New contact recipe section added to recipe tool
----- Get correct frequency axis for PSD of contact LER
----- Add new advanced contact results window with both average and individual results individual results selected based on the "line select" widget
----- Add advanced contact plot tool, similar to advanced LER tool
----- Added compound analysis capabilities to contact LER mode
----- Made advanced LER tool work in contact LER mode

4/30/06: Version 4.3.1
- Improved CD computation accuracy in the precense of residual image rotation.
- Pitch and duty cycle now reported in the Advanced Results Window.
- Fixed bug that prevented ascii plot export when running without the Dev. Kit.
- Fixed bug that caused program crash when a summary report is requested from the Advanced LER tool when only one line has been analyzed.

4/17/06: Version 4.3.0
- New fence option enabling the user to explicitly define both left and right fence positions for each line separately (inner fence lines not shared). This greater flexibiity in fence positioning allow for optimization to highly asymetric line images. This new mode also allows lines too be skipped over. This new feature is selectable from the Fence section of the Recipe tool.
- New inner limit line feature allowing interior lines to be excluded from the analysis based on the positioning of this second set of vertical limit lines. This can be achieved both in conventional and the new non-shared fence modes. This feature is selectable through the Fence menu.
- Improved visibility of horizontal and vertical limit lines.
- New limit line setting allowing them to be set to a default value on image load.

3/17/06: Version 4.2.0
- New full projection image prefilter capability form measuring CD from very noisy images
- New fine auto-rotation compensation capabilities with user definable resolution and capture range
- New auto-fence filter capabilities improving autofence performance with noisy images

1/10/06: Version 4.1.0
- Improve SVL Lc accuracy by using sigma infinity
- New LER image synthesis capabilities (self-affine, white, sinusoidal)
- New window-selection menu for improved usability with multiple open tools

9/25/05: Version 4.0.0
- New pattern recognition capabilities enabling device-level LER measurement
- New ROI-based measurement-region selection method and movable ROI
- Autocalculate option on creation and moving of ROI
- True aspect ratio display capabilities for images with non-square pixels
- Improved batch output for scaling metrics
- New optional corner-rounding toolbox available
- New optional surface toolbox available including surface PSD computation and flare estimation tools

7/25/05: Version 3.7.6
- New loose pitch auto-fence algorithm added
- New auto fence algorithms that use a user set pitch instead of the estimated pitch
- Added an alternate general purpose autofence algorithm
- Fixed bug with trying to set iso line autofence mode from the recipe tool
- Improved accuracy and robustness of roughness exponent extraction from PSD
- Fixed computation error in the correlation length from HHCF
- Fixed bug in side-averaged threshold algorithm that could cause crash
- New automatic calibration capabilities for Hitachi CD-SEM
- Fixed bug in side-averaged threshold algorithm that could cause crash
- Fixed bug that caused Advanced LER Summary window to close after exporting data
- Fixed bug that caused a crash when Advanced LER tool under certain conditions
- Added Autocorrelation, HHCF, and Histogram plots to "Export all data to CSV file"
- Added Zygo file import capabilities
- Added crop to limit lines and undo crop capabilities

4/2/05: Version 3.7.2
- Enhanced usability of semi-auto fence in batch mode
- Averaged-line threshold method improved with respect to sensitivity to image tilt
- New side-independent thresholding algorithm added
- New advanced results window showing estimated noise-free and infinite length LER/LWR values
- New estimated metrics also saved to batch output file

2/19/05: Version 3.7.0
- New autocorrelation plot to Advanced LER Tool
- New edge correlation visualization tool
- New metrology noise estimation tool
- New model-based non-linear least squares edge-detection algorithm
- Enhanced image processing capabilities: export, undo, brightness/contrast
- New image colormap options
- Plot export capabilities for all plots through right-click context menus
- Installer will memorize serial number for future upgrade installations
- Fix bug that could cause erroneous warning message in semi-automatic fence modes

1/12/05: Version 3.6.0
- New autocalibration capabilities for AMAT SEMs
- New rectangular pixel capabilities
- Improved trench algorithms
- Recursive outlier correction
- Improved autofence
- Improved HHCF, SVL, and PSD metric extraction algorithms
- Fourier Domain SVL computation capabilities for improved speed
- User setable PSD computation length
- Plot export capabilities in Advanced LER tool through context menu
- New Wiener prefilter capabilities

12/5/04: Version 3.5.4
- Assymetric prefiltering capabilities added
- Gaussian filter size and sigma can now be seperately defined
- Image prefiltering preview capabilities added
- Expanded header section of CSV output file
- Added configuration snapshot output file to batch mode
- Update check on startup
- Fixed bug that caused image server to require at least thee image files in the watch directory

11/14/04: Version 3.5.0
- SuMMIT background analysis server functionality added: turn an analytic SEM into a CD SEM
- Fixed bugs in scripting language interpreter
- Improved autofencing capabilities
- Separate pre and post filter cut-off definitions
- More prefilter options
- 10x improvement in prefilter speed
- Added recipe lock functionality to recipe tool
- Fixed bug with loading recipes
- Added %line break option to LER calculation section of recipe tool
- Added PSD computation apodization window selection to recipe tool
- Added limit line settings to recipe tool
- Added full-length option to LER analysis length section in recipe tool
- Fixed bug in advanced LER GUI
- Added correlation-length estimation to sigma versus length plot
- Corrected error in correlation length estimation from height-height correlation plot
- Added roughness exponent estimation from PSD in advanced LER tool
- Added histogram plot with moment metrics to advanced LER tool
- Added advanced metric output to batch mode
- Added averaged PSD data to batch output and csv export file
- Added vertical limit lines and mode both vertical and horizontal limit lines wider
- Limit lines now rotate with image rotation
- Fixed bug that occured in rare cases when loading non-LEO tiff files
- Added image preview to file open dialog
- Expanded capabilities of compound analysis to handle virtually unlimited number of images
- Added cancel capabilities and %done status info when running batch or compound analysis
- Added new batch file generation capabilities using a multi-file open dialog
- Added name filtering capabilities to the directory-to-batch function
- Fixed bug related to using non-tif files in batch mode
- New User-defined prefiltering and LER-calculation capabilities added to Developer's Kit

8/1/04: Version 3.0.0
- Support new SEM file formats beyond tif and bmp: jpeg, gif, png, ras, ppm, hdf, pcx, xwd, bpm, pgm
- Improved GUI features
- - - Vertical limit lines added
- - - Vertical and horizontal limit lines easier to see and move
- - - Limit lines rotate with image
- - - File open dialog with image preview
- New Advanced Metrology Metric tool includes:
- - - PSD plot
- - - Height-height correlation plot
- - - Sigma versus length plot
- - - Histogram plot
- - - Automatic feature extraction and reporting for each plot type
- - - Supports LER and LWRv - - - Supports individual lines or left/right/full averaging
- - - Supports post filtering
- - - Summary capabilities generating table of all metrics for all lines
- - - Summary export capablities
- New metrology recipe tool
- - - Collects all user-setable computation controls into single streamlined dialog box
- - - Enables storage and retrieval of recipes
- - - Simplifies sharing and standardizing of recipes among users
- New script language capabilities
- - - Full GUI functionality implemented in scripting language
- - - Data export capabilities
- - - Batch-file execution capabilities
- - - Script file can be passed as a command-line startup argument enabling automatic execution and remote operations
- Improved batch and compound analysis capabilities
- - - Progress feedback and cancel capabilities
- - - Unlimited compound analysis size
- - - More automated batch file generation tools
- - - More file types supported in batch mode
- - - More data added to batch output file: correlation length, roughness exponent, average PSD ...
- New image filtering capabilities
- - - Separately define pre and post filter settings
- - - 10x speed improvement in prefilter
- - - New Gaussian, median, and averaging filter options added
- New Analysis Server functionality
- - - Run SuMMIT in the background on your analytic SEM and turn it into a CD-SEM
- Improved handling of trenches
- User control of the autofence threshold value
- Individual line CD and filtered LER/LWR data now included in the batch output file
- New autofence algorithm allowing for isolation of user-defined number of center lines
- LER analysis length can now be independently defined from the horizontal fence positions
- New user-defined fence capabilities in Developer's Kit
- New User-defined prefiltering and LER-calculation capabilities added to Developer's Kit
- Streamlined deployment of Matlab-based Developer's Kit allowing more shared resources when both products are installed

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